2018-03-01,Microsystems & Nanoengineering Summit 2018(MINE2018) 时间:2018年7月8至11日(7月8日注册报到) 地点:中国科学院学术会堂(地址:北京市海淀区中关村北一条15号)
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作者 佚名 摘自 未知 发表 2007-05-23 00:33:30 人气 6224 背景色 杏仁黄 秋叶褐 胭脂红 芥末绿 天蓝 雪青 灰 银河白(默认色) 字号   


Current Research on Nano-imprint Technology Development Using Excimer Laser and Molecular Dynamic Simulation

: 萧飞宾 教授



Email: fbhsiao@mail.ncku.edu.tw http://rpv.iaa.ncku.edu.tw



Professor Fei-Bin Hsiao received both B.S. and M.S. degrees in Power Mechanical Engineering from National Tsing-Hua University (Taiwan) and a Ph. D. degree in Aerospace Engineering from University of Southern California (USA). He joined the Institute of Aeronautics and Astronautics, National Cheng Kung University (NCKU), in 1985 and was promoted to a full Professor in 1990 and a Distinguished Professor in 2004. Prof. Hsiao has served as Associate Dean of the Engineering College and Founding Director of Graduate Institute of Micro-Electro-Mechanical System in NCKU. His current researches of interest include fluid mechanics, aerodynamics, unmanned aerial vehicle (UAV) system, space system engineering and microsatellite technology development, and Nano- and MEMS applications. He is a Fellow of American Institute of Aeronautics and Astronautics (AIAA), a corresponding Member of International Academy of Astronautics (IAA), and a Fellow of Aeronautical and Astronautical Society of ROC. He also serves as an active member in various activities in domestic and international academic associations and conferences.

Current Research on Nano-imprint Technology Development Using Excimer Laser and Molecular Dynamic Simulation

Professor Fei-Bin Hsiao, PhD

Institute of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan 70101

Email: fbhsiao@mail.ncku.edu.tw http://rpv.iaa.ncku.edu.tw


This presentation will basically review our recent national-sponsored project on laser-assisted direct imprint (LADI) using excimer laser as machining source in our research team. The LADI technique is considered to be a significant breakthrough of nano imprint lithography in recent years. Several key issues of LADI such as the physical mechanism during fabrication process, optimized fabrication parameters as well as its optimization, and the influence of LADI fabrication process onto the material characteristics, will be introduced in this presentation. In theoretical analysis, we developed a one-dimensional modeling and simulation considering the optical reflection, laser absorption, heat conduction, melting phase-change as well as thermal-contact resistance between two materials. Furthermore, two-dimensional simulation was explored based on the Molecular Dynamics (MD), and at the same time, a multi-scale simulation of imprinting process, currently, is established by combination of finite element method (FEM) and MD. For experimental testing, a high quality imprinting can be resulted in the control of the type of laser source, laser fluence and applied pressure. Mold fabrication and large-area imprinting are the two most vital technologies for high throughput and various applications. We proposed a direct metal transfer imprinting based on infrared pulsed laser heating for quartz mold fabrication and a novel laser assisted roller imprinting (LARI) technology for large-area direct imprinting. According to the our experiences and capabilities in nano-imprinting, this project is now extended into more advanced and applicable roller-based nano-imprinting technology, with a clear goal in next-generation flexible display technology

上一篇文章 ieee-nanomed--Call for paper
下一篇文章 暑期微纳米加工技术讲习班(7月17-21日,北京).

ieee-nanomed--Call for paper(CINS,2007-05-07,10949)


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