Self-Configuring CMOS Microsystems
演讲人: Gary K. Fedder教授
Institute for Complex Engineered Systems
Department of Electrical and Computer Engineering and The Robotics Institute
Carnegie Mellon University, Pittsburgh, PA, email@example.com
[摘要] Prof. Fedder’s research for the past 20 years has revolved around monolithic integration of MEMS with CMOS and development of the requisite design and modeling paradigm to create complex on-chip microsystems. The “More than Moore” trend in the microelectronics industry is driving a keen interest in mixed-physics microsystem integration. Integration becomes a necessity for multi-component microsystems, where wiring between MEMS and electronics scales with MEMS component count. Integration also drives down parasitic capacitances and thus provides opportunities for ultra-low-power and/or ultra-compact microsystems. As examples of such systems, I’ll first provide a brief overview of the various MEMS design and fabrication efforts in my group. An emerging feature of many of our newest projects is the need for self-configuration and control in the presence of manufacturing and environmental variability. These are general attributes that hold promise of providing high manufacturing yield, resiliency and redundancy for critical applications. One class of such systems are RF circuits tightly integrated with multiple electrothermally actuated MEMS capacitors that lead to a variety of low-loss, frequency reconfigurable circuit blocks. Another exemplary self-configuring system is micro-instrumented scanning probe arrays for tip-based nanomanufacturing.
[演讲人] Gary K. Fedder is Director of the Institute of Complex Engineered Systems, Howard M. Wilkoff Professor of Electrical and Computer Engineering and Professor in The Robotics Institute at Carnegie Mellon University. He received his B.S. and M.S. degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his Ph.D. degree from U. C. Berkeley in 1994. From 1984 to 1989, he worked at Hewlett-Packard on circuit design and printed-circuit modeling. He is an IEEE Fellow and received the 1994 AIME Electronic Materials Society Ross Tucker Award, the 1996 Carnegie Institute of Technology G.T. Ladd Award, and the 1996 NSF CAREER Award. He currently serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems, on the editorial boards of the IoP Journal of Micromechanics and Microengineering and IET Micro & Nano Letters and as co-editor of the Wiley-VCH Advanced Micro- and Nanosystems book series. He has contributed to over 190 research publications and holds several patents in the MEMS area. His research interests include microsensor and microactuator design and modeling, integrated MEMS manufactured in CMOS processes and structured design methodologies for MEMS.
Fig. 3: Resonant cantilever oscillator for gravimetric gas analyte detection. (a) Device. (b) Close-up of the end of the cantilever.