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作者 佚名 摘自 未知 发表 2015-11-30 16:33:08 人气 2645 背景色 杏仁黄 秋叶褐 胭脂红 芥末绿 天蓝 雪青 灰 银河白(默认色) 字号   



讲座一:SOI and SiC MEMS Devices

演讲人: Dr. Yong Zhu and Dr. Dzung Dao

Queensland Micro and Nanotechnology
Centre, Griffith University, QLD, Australia

【Abstract】A micromachined
electrometer, based on the concept of a variable capacitor, has been designed,
modeled, fabricated, and tested. The device functions as a modulated variable
capacitor, wherein a dc charge to be measured is up-modulated and converted to
an ac voltage output, thus improving the signal-to-noise ratio. The device was
fabricated in a commercial standard SOI micromachining process without the need
for any additional processing steps. The electrometer was tested in both air
and vacuum at room temperature. In air, it has a charge-to-voltage conversion
gain of 2.06 nV/e, and a measured charge noise floor of 52.4 e/rtHz. To reduce
the effects of input leakage current, an electrically isolated capacitor has
been introduced between the variable capacitor and input to sensor electronics.

Silicon carbide (SiC)
has attracted considerable attention in recent years for sensing applications
in harsh environment. In this workshop, we will briefly introduce about our
Queensland Micro and Nanotechnology Centre (Griffith University), where high
quality 3C-SiC thinfilms are grown on large Si wafers and applied in MEMS/NEMS
transducers. Several effects in the 3C-SiC thinfilms for sensing applications,
such as the piezoresistive, thermoresistive, etc. will be also presented. The results
show that 3C-SiC is a promising material for robust MEMS/NEMS physical sensors.

【Bio】Dr. Yong Zhu received a
Ph.D degree in Microelectronics from the Peking University, Beijing, China, in
2005. He worked as a Research Associate in University of Cambridge, UK, in 2006
and 2007. From 2008 to 2011, he was a Research Academic in the University
of Newcastle, Australia. Currently he holds a senior lecturer position at
the School of Engineering, Griffith University, Australia. His research interests
include N/MEMS analysis and design, micro-fabrication, micromachined
resonators, power harvesters, nanopositioners, capacitive sensors, biomedical
sensors, RF MEMS, robust control of microactuators, as well as interface
circuits design.

Dr. Dzung V. DAO received
the BS and MS degrees from Hanoi Univ. of Sci. & Tech. (HUST, Vietnam) in
1995 and 1997, respectively, and the Ph.D. from Ritsumeikan Univ. (Japan) in
2003, then served as a Postdoctoral Research Fellow, a Lecturer and a Chair
Professor from 2003 to 2011 there. From 2011 he joined Griffith Univ. as a
Senior Lecturer, teaching in Mechatronics and Mechanical Engineering, now he is
the director of Mechatronic program, and a member of the National Committee on
Mechatronics, Engineers Australia. Dr. Dao’s research interests are sensing
effects in nanostructured materials, silicon & silicon carbide
micromachined sensors, micro actuators, integrated MEMS/NEMS technology, and
robotics. Dr Dao has published over 260 papers in scientific journals and conference
proceedings, and filed 15 Japanese patents.

讲座二:Smart and
Robust Sensing Systems Enabled by MEMS Technology and Low Power Electronics

演讲人: Dr. Darrin Young

of Electrical and Computer Engineering

of Utah, Salt Lake City, Utah, USA

Abstract: Advancement
in micromachined sensors, actuators, and low-power integrated electronics has
fueled recent rapid development in wireless microsystem technology providing
smart robust sensing and wireless communication capability. Ultra low system power
dissipation allows batteryless microsystem to be achieved with a small form
factor and powered by ambient or external energy sources. Such system is
crucial for biomedical as well as industrial sensing applications, where size,
weight, and limited access are critical system design constraints. Optimized
design in system, device, circuit, and packaging is highly important for
achieving an overall high performance. In this seminar, I will first present two
on-going research efforts from my research laboratory on (1) wireless
implantable glucose sensor and (2) flexible tactile sensor array. System design
architecture, sensing principles, and measurement results will be described.

上一篇文章 2014年微纳前沿技术暑期学校圆满结束.
下一篇文章 国际科技合作项目??德国 匈牙利 乌兹别克斯坦 蒙古 拉.

ieee-nanomed--Call for paper(CINS,2007-05-07,11602)


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